Recent Features
- Using combinatorial science to qualify new processes and materials 12/01/2008
- III-V MOSFETs for future CMOS transistor applications 12/01/2008
- High-k etch performance for next-generation logic gate stacks 12/01/2008
- Featured Products 12/01/2008
- Product News 12/01/2008
Recent Products
- Allegheny 12/01/2008
- FPS5300 12/01/2008
- Orion single-wafer cleaning system 12/01/2008
- S300 atomic layer deposition system 12/01/2008
- Twinscan NXTS 12/01/2008
Related White Papers
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New Encapsulated Piezo Actuators for High-Reliability Applications in the Semiconductor Industry
12/01/2008
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Piezo Flexure Nanopositioning Stages and Scanners For Surface Metrology & Nanolithography
12/01/2008
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Sub-Nanometer Precision Hybrid Positioning Systems for Vertical Inspection Tools in Nanotechnology and Semiconductors
12/01/2008
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S/TEM: TrueCrystal Combines With S/TEM Systems For Automated Strain Analysis with Less Stress
12/01/2008
Qcept, CEA-Leti to explore leading-edge characterization, yield
Date: May, 2008May 28, 2008 - Qcept Technologies and European R&D organization CEA-Leti have inked a deal to investigate techniques for characterizing leading-edge semiconductor materials and processes, including high-/low-k dielectrics, atomic layer deposition (ALD), fully silicided (FUSI) metal gates, and advanced cleaning technologies. Under the deal, Qcept's ChemetriQ non-visual defect inspection has been installed at CEA-Leti's facility in Grenoble, France, to augment existing process characterization capabilities.
"Advanced materials and processes, such as high-k dielectrics and metal gates, have the potential to significantly enhance the performance of future generations of semiconductor devices. However, their complexity can give rise to new and unique yield problems, which require innovative inspection methods," said Adrien Danel, lead research engineer at CEA-Leti, in a statement. "This partnership with Qcept can help us to better understand the yield issues surrounding these materials and processes in order to speed their development and integration into full-scale manufacturing."
"Working with CEA-Leti will provide us with a unique opportunity to have early access to these advanced technologies -- allowing us to qualify our ChemetriQ solution for some of the industry's most cutting-edge applications," added Ralph Spicer, VP of marketing for Qcept.
In March of this year, Atlanta, GA-based Qcept raised another $9.5M in a Series C round of funding, bringing the overall total financing raised to roughly $25M.


