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Lithography

CMP OR Etching OR RIEResults 1 - 10 of about 5210 | 0.054 seconds

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... These improvements can be illustrated in the application of combinatorial methods
to optimize a copper post-CMP cleaning process aimed at improving copper ...
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... Dry etching is essential for high-performance metal gate/high- k devices
at 45nm and beyond. Unlike SiO 2 -based gate oxide that ...
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... approach. In the standard Bosch process, the etch rate degrades as the
etching goes deeper, resulting in a scalloped sidewall. To ...
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Solid State Technology - KLA-Tencor gets the noise out with latest plasma monitor -
KLA-Tencor recently introduced the PlasmaVolt X2 for measurement of plasma chamber ...
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Solid State Technology - Inside Oxford/TDI’s HVPE technique for InGaN growth - TDI,
an Oxford Instruments company, recently announced that it has developed a hydride ...
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Solid State Technology - Featured Products -.
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Solid State Technology - III-V MOSFETs for future CMOS transistor applications -
III-V semiconductors are commonplace in laser and lighting applications and provide ...
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Solid State Technology - Moore’s Law?the z-dimension: a decade later -.
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Solid State Technology - Analysts: “Long, dark season” ahead - Many OEMs held off
on the usual holiday-season production ramp amid expectations of weak consumer ...
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